MOEMS and Miniaturized Systemsde M. Edward MotamediMateriasMiniature electronic equipmentMicromechanicsOptoelectronic devicesMicroelectromechanical systemsCongressesOptical scannersEdiciones (1)MOEMS and miniaturized systems (2000)SPIE · inglésMás obras de M. Edward MotamediMiniaturized systems with micro-optics and micromechanics IIIMicroelectronic structures and MEMS for optical processing IIIMiniaturized systems with micro-optics and MEMS