MOEMS and miniaturized systems IIde M. Edward MotamediMateriasMicroelectromechanical systemsMicromechanicsMiniature electronic equipmentOptical scannersCongressesEdiciones (1)MOEMS and miniaturized systems II (2001)SPIE · inglésMás obras de M. Edward MotamediMiniaturized systems with micro-optics and micromechanics IIIMicroelectronic structures and MEMS for optical processing IIIMiniaturized systems with micro-optics and MEMS