Microelectronic structures and MEMS for optical processing IIIde M. Edward Motamedi, Hans Peter HerzigMateriasMicroelectromechanical systemsOptoelectronicsMicroelectronicsCongressesOptical instrumentsElectromechanical devicesEdiciones (1)Microelectronic structures and MEMS for optical processing III (1997)SPIE · inglésMás obras de M. Edward Motamedi
