Miniaturized systems with micro-optics and MEMSde M. Edward MotamediMateriasMicroelectromechanical systemsMicromechanicsCongressesIntegrated opticsOptical scannersMiniature electronic equipmentElectroopticsEdiciones (1)Miniaturized systems with micro-optics and MEMS (1999)SPIE · inglésMás obras de M. Edward Motamedi