MOEMSde M. Edward MotamediMateriasMicroelectromechanical systemsMicrofabricationOptoelectronic devicesMicroelectronicsEdiciones (2)MOEMS (2005)SPIE Publications · inglés · ISBN 9780819450210MOEMS (2005)SPIE Press · inglésMás obras de M. Edward MotamediMiniaturized systems with micro-optics and micromechanics IIIMicroelectronic structures and MEMS for optical processing IIIMiniaturized systems with micro-optics and MEMS