Microsystems engineeringde Christophe GoreckiMateriasMicroelectromechanical systemsIndustrial applicationsMicroelectronicsOptical methodsQuality controlCongressesOptical detectorsInterferometryEdiciones (1)Microsystems engineering (2001)SPIE · inglésMás obras de Christophe GoreckiOOptical micro- and nanometrology in microsystems technology Optical micro- and nanometrology in microsystems technology IIOOptical micro- and nanometrology IIIOptical micro- and nanometrology IIIOOptical micro- and nanometrology IIIOptical micro- and nanometrology III
OOptical micro- and nanometrology in microsystems technology Optical micro- and nanometrology in microsystems technology II