Microsystems engineeringde Christophe GoreckiMateriasMicroelectromechanical systemsMensurationIndustrial applicationsMicroelectronicsOptical methodsQuality controlCongressesOptical detectorsInterferometryMeasurementElectromechanical devices
OOptical micro- and nanometrology in microsystems technology Optical micro- and nanometrology in microsystems technology II
OOptical measurement systems for industrial inspection VOptical measurement systems for industrial inspection V