Microsystems metrology and inspectionde Christophe GoreckiMateriasMicroelectromechanical systemsMensurationCongressesInterferometryOptical instrumentsMicroelectronicsIndustrial applicationsMeasurementOpticsEdiciones (1)Microsystems metrology and inspection (1999)SPIE · inglésMás obras de Christophe GoreckiOOptical micro- and nanometrology in microsystems technology Optical micro- and nanometrology in microsystems technology IIOOptical micro- and nanometrology IIIOptical micro- and nanometrology IIIOOptical micro- and nanometrology IIIOptical micro- and nanometrology III
OOptical micro- and nanometrology in microsystems technology Optical micro- and nanometrology in microsystems technology II
OOptical measurement systems for industrial inspection VOptical measurement systems for industrial inspection V
