Sub-half-micron lithography for ULSIs

Materias

• Integrated circuits
• Ultra large scale integration
• Microlithography
• Printed circuits
• Design and construction

Ediciones (2)

• Sub-half-micron lithography for ULSIs (2000)

  Cambridge University Press · inglés

• Sub-Half-Micron Lithography for ULSIs (Cambridge Studies in Semiconductor Physics & Microelectronic Engineering) (2000)

  Cambridge University Press · inglés · ISBN 9780521570800

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