Silicon wafer bonding technology

Materias

• Very large scale integration
• Silicon-on-insulator technology
• Semiconductor wafers
• Integrated circuits
• Microelectromechanical systems

Ediciones (2)

• Silicon wafer bonding technology (2002)

  Institution of Electrical Engineers · inglés

• Silicon Wafer Bonding Technology for Vlsi and Mems Applications (Emis Processing Series, 1) (2002)

  INSPEC, Inc. · inglés · ISBN 9780852960394

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