MMicro- and nanotechnologyMicro- and nanotechnologyde Jung-Chih ChiaoMateriasMicroelectromechanical systemsMaterialsCongressesNanotechnologyMicrotechnologyElectronic packagingEdiciones (1)Micro- and nanotechnology (2008)SPIE · inglés · ISBN 9780819475213Más obras de Jung-Chih ChiaoDevice and process technologies for microelectronics, MEMS, and photonics IVMMEMS/MOEMS technologies and applications IIIMEMS/MOEMS technologies and applications IIIMMicro- and nanotechnologyMicro- and nanotechnology