MMEMS/MOEMS technologies and applications IIIMEMS/MOEMS technologies and applications IIIde Jung-Chih ChiaoMateriasMicroelectromechanical systemsCongressesOptoelectronic devicesEdiciones (1)MEMS/MOEMS technologies and applications III (2008)SPIE · inglés · ISBN 9780819470119Más obras de Jung-Chih ChiaoDevice and process technologies for microelectronics, MEMS, and photonics IV