Device and process technologies for microelectronics, MEMS, and photonics IV

Materias

• Photonics
• Microelectromechanical systems
• Photomechanical processes
• Congresses
• Photolithography

Ediciones (2)

• Device and process technologies for microelectronics, MEMS, and photonics IV (2006)

  SPIE · inglés

• Device and Process Technologies for Microelectronics, Mems, and Photonics 4 (2006)

  Society of Photo Optical · inglés · ISBN 9780819460684

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