MMEMS/MOEMS components and their applications VMEMS/MOEMS components and their applications Vde Srinivas A. TadigadapaMateriasTransducteursMicroelectromechanical systemsTransducersMicrosystèmes électromécaniquesCongrèsCongressesDispositifs optoélectroniquesOptoelectronic devicesEdiciones (1)MEMS/MOEMS components and their applications V (2008)