MEMS/MOEMS components and their applications V
special focus topics : transducers at the micro-nano interface : 21-22 January 2008, San Jose, California, USA
Edición de la obra MEMS/MOEMS components and their applications V
| Autor | Srinivas A. Tadigadapa |
|---|---|
| Editorial | SPIE |
| Fecha de publicación | 2008 |
| Lugar | Bellingham, Wash |
| Idioma | inglés |
| ISBN-13 | 9780819470607 |
| ISBN-10 | 0819470600 |
| OCLC | 229158274 |
| LCCN | 2010459242 |
| Serie | Proceedings of SPIE -- v. 6885 · Proceedings of SPIE--the International Society for Optical Engineering -- v. 6885. |