Laser microfabricationde Daniel J. Ehrlich, Jeffrey Y. TsaoMateriasThin film devicesMicrofabricationLasersMicrolithographyIndustrial applicationsDesign and constructionLasers, industrial applicationsThin filmsEdiciones (4)
LLaser and particle-beam chemical processing for microelectroLaser and particle-beam chemical processing for microelectronics
PProceedings of the Topical Meeting on the Microphysics of SuProceedings of the Topical Meeting on the Microphysics of Surfaces, Beams, and Adsorbates, 4-6 February 1985, Santa Fe, New Mexico
