Integrated Circuit Metrology, Inspection, and Process Controlde Kevin M. MonahanMateriasIntegrated circuitsWeights and measuresCongressesMeasurementProcess controlEngineering inspectionQuality controlOptical methodsEdiciones (2)Integrated Circuit Metrology, Inspection, and Process Control (1987)
HHandbook of critical dimension metrology and process controlHandbook of critical dimension metrology and process control
IIntegrated Circuit Metrology, Inspection and Process ControlIntegrated Circuit Metrology, Inspection and Process Control II (Spie, Vol 921)
