Integrated Circuit Metrology, Inspection, and Process Control
Edición de la obra Integrated Circuit Metrology, Inspection, and Process Control
| Autor | Kevin M. Monahan |
|---|---|
| Editorial | Society of Photo Optical |
| Fecha de publicación | July 1987 |
| Formato | Paperback |
| ISBN-13 | 9780892528103 |
| ISBN-10 | 0892528109 |
| Serie | Proceedings of Spie--the International Society for Optical Engineering, Vol 775 |
| Número de Cutter | M734i |