Integrated circuit metrology, inspection, and process control
[papers]
Edición de la obra Integrated Circuit Metrology, Inspection, and Process Control
| Autor | Kevin M. Monahan |
|---|---|
| Editorial | SPIE--the International Society for Optical Engineering |
| Fecha de publicación | 1987 |
| Lugar | Bellingham, Wash., USA |
| Idioma | inglés |
| Páginas | 329 |
| ISBN-10 | 0892528109 |
| OCLC | 506122097 |
| LCCN | 87060743 |
| Serie | Proceedings of SPIE--the International Society for Optical Engineering -- v. 775. |