Semiconductor measurement technology
evolution of silicon materials characterization : lessons learned for improved manufacturing
Edición de la obra Semiconductor measurement technology
| Autor | W. Murray Bullis |
|---|---|
| Editorial | U.S. Dept. of Commerce, National Institute of Standards and Technology, For sale by the Supt. of Docs., U.S. G.P.O. |
| Fecha de publicación | 1993 |
| Lugar | Gaithersburg, MD, Washington, D.C |
| Idioma | inglés |
| Páginas | 211 |
| Formato | Microform |
| Serie | NIST special publication -- 400-92. |
| Número de Cutter | B937s |