Metrology for submicrometer devices and circuits
Edición de la obra Metrology for submicrometer devices and circuits
| Autor | W. Murray Bullis |
|---|---|
| Editorial | U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off. |
| Fecha de publicación | 1980 |
| Lugar | Washington, D.C |
| Idioma | inglés |
| Páginas | 34 |
| OCLC | 6527685 |
| LCCN | 80600054 |
| Serie | Semiconductor measurement technology · NBS special publication ; 400-61 · NBS special publication ; |
| Número de Cutter | B937m |