Evolution of silicon materials characterization
lessons learned for improved manufacturing
Edición de la obra Evolution of silicon materials characterization
| Autor | W. Murray Bullis |
|---|---|
| Editorial | U.S. Dept. of Commerce, National Institute of Standards and Technology, For sale by the Supt. of Docs., U.S. G.P.O. |
| Fecha de publicación | 1993 |
| Lugar | Gaithersburg, MD, Washington, DC |
| Idioma | inglés |
| Páginas | 211 |
| OCLC | 30019630 |
| LCCN | 94197010 |
| Serie | Semiconductor measurement technology · NIST special publication ; · 400-92 |
| Número de Cutter | B937e |