Characterization and metrology for ULSI technology
1998 international conference, Gaithersburg, Maryland, March 1998
Edición de la obra Characterization and metrology for ULSI technology
| Autor | David G. Seiler |
|---|---|
| Editorial | American Institute of Physics |
| Fecha de publicación | 1998 |
| Lugar | Woodbury, NY |
| Idioma | inglés |
| Páginas | 960 |
| ISBN-10 | 1563967537, 1563968681 |
| OCLC | 40618877 |
| LCCN | 98087959 |
| Serie | AIP conference proceedings, · 449 · AIP conference proceedings ; |
| Número de Cutter |