The MEMS handbookde Mohamed Gad-el-HakMateriasMicroelectromechanical systemsHandbooks, manualsMicroactuatorsDetectorsRobotsMicrofabricationDesign and constructionMechanical engineering, handbooks, manuals, etc.NanotechnologyMicroelectronicsTECHNOLOGY & ENGINEERINGElectronicsEdiciones (1)The MEMS handbook (2005)Taylor&Francis · inglésMás obras de Mohamed Gad-el-HakThe MEMS handbookThe MEMS handbookMEMSMEMS