Micromachined devices and components Vde Eric PeetersMateriasMicromachiningMicromechanicsCongressesElectromechanical devicesOpticsEdiciones (1)Micromachined devices and components V (1999)SPIE · inglésMás obras de Eric PeetersAdvanced DPA Theory and PracticeMMicromachined devices and components VIMicromachined devices and components VIAdvanced DPA Theory and Practice
MMaterials Science of Microelectromechanical Systems DevicesMaterials Science of Microelectromechanical Systems Devices II
PProcess development for 3D silicon microstructures, with appProcess development for 3D silicon microstructures, with application to mechanical sensor devices
