Microelectronics technology and process integrationde S. P. MurarkaMateriasCongressesPlasma etchingDielectric filmsMetallizingIntegrated circuitsDesign and constructionEdiciones (1)Microelectronics technology and process integration (1994)SPIE · inglésMás obras de S. P. Murarka
IInterlayer dielectrics for semiconductor technologiesInterlayer dielectrics for semiconductor technologies