Microelectronics technology and process integration
20-21 October 1994, Austin, Texas
Edición de la obra Microelectronics technology and process integration
| Autor | S. P. Murarka |
|---|---|
| Editorial | SPIE |
| Fecha de publicación | 1994 |
| Lugar | Bellingham, Wash., USA |
| Idioma | inglés |
| Páginas | 290 |
| ISBN-10 | 0819416681 |
| OCLC | 31210232 |
| LCCN | 94067261 |
| Serie | Proceedings / SPIE--the International Society for Optical Engineering ; · v. 2335 · Proceedings of SPIE--the International Society for Optical Engineering ; |