Microelectromechanical systems--materials and devices III

Materias

• Silicon
• Microelectromechanical systems
• Materials
• Congresses
• Nanostructured materials
• Thin films

Ediciones (2)

• Microelectromechanical Systems-Materials and Devices III (2014)

  Cambridge University Press · inglés · ISBN 9781107408043

• Microelectromechanical systems--materials and devices III (2010)

  Materials Research Society · inglés · ISBN 9781605111957

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