Microelectromechanical systems--materials and devices III
symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A.
Edición de la obra Microelectromechanical systems--materials and devices III
| Autor | Jörg Bagdahn |
|---|---|
| Editorial | Materials Research Society |
| Fecha de publicación | 2010 |
| Lugar | Warrendale, Pa |
| Idioma | inglés |
| Páginas | 211 |
| ISBN-13 | 9781605111957 |
| ISBN-10 | 1605111953 |
| OCLC | 646292092 |
| LCCN | 2012359231 |
| Serie |