MMicrobiochips monolithically integrated with microfluidics, Microbiochips monolithically integrated with microfluidics, micromechanics, photonics, and electronics by 3D femtosecond laser direct writingde Ya ChengMateriasMicrochip Analytical ProceduresNanostructuresMethodsBiochipsMicrotechnologyDesign and constructionUltrashort Laser pulsesBioMEMSNanotechnologyBiosensing Techniques