UUltrafast Laser ProcessingUltrafast Laser Processingde Koji Sugioka, Ya ChengMateriasNanotechnologyLasers, industrial applicationsPhysical sciencesLaser pulses, ultrashortFemtosecond lasersUltrashort Laser pulsesLasers femtosecondesImpulsions laser ultra-brèvesTECHNOLOGY & ENGINEERING