Metallizationde Gennady Sh GildenblatMateriasVapor-platingMetallic filmsVery large scale integrationTestingReliabilityCongressesMetallizingIntegrated circuitsMicrolithographyMetal coatingMaterialsEdiciones (1)Metallization (1991)SPIE · inglésMás obras de Gennady Sh GildenblatCompact ModelingAAdvanced MOS device physicsAdvanced MOS device physicsVLSI metallization