Metallization
performance and reliability issues for VLSI and ULSI ; 12-13 September 1991, San Jose, California
Edición de la obra Metallization
| Autor | Gennady Sh Gildenblat |
|---|---|
| Editorial | SPIE |
| Fecha de publicación | 1991 |
| Lugar | Bellingham, Wash |
| Idioma | inglés |
| Páginas | 159 |
| ISBN-10 | 0819407275 |
| OCLC | 25384158 |
| LCCN | 91067549 |
| Serie | Proceedings / SPIE--the International Society for Optical Engineering ; · v. 1596 · Proceedings of SPIE--the International Society for Optical Engineering ; |
| Número de Cutter | G468m |