MEMS length and strain measurements using an optical interferometer
de J. C. Marshall · Publicada por primera vez en 2001
Materias
Ediciones (3)
- MEMS length and strain measurements using an optical interferometer (2001)
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology · inglés
- MEMS length and strain measurements using an optical interferometer (2001)
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology · inglés
- MEMS length and strain measurements using an optical interferometer (2001)
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology · inglés