MEMS length and strain measurements using an optical interferometer
Edición de la obra MEMS length and strain measurements using an optical interferometer
| Autor | J. C. Marshall |
|---|---|
| Editorial | U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology |
| Fecha de publicación | 2001 |
| Lugar | Gaithersburg, MD |
| Idioma | inglés |
| Páginas | 81 |
| Formato | Microform |
| OCLC | 50255496 |
| Serie | NISTIR -- 6779. |
| Número de Cutter | M368m |