AA bulk silicon microelectromechanical system for scanning thA bulk silicon microelectromechanical system for scanning thermal profilometryde Yogesh B. GianchandaniMateriasElectrical engineeringEdiciones (1)A bulk silicon microelectromechanical system for scanning thermal profilometry (1994)inglésMás obras de Yogesh B. GianchandaniCComprehensive MicrosystemsComprehensive MicrosystemsVer todas las obras de Yogesh B. Gianchandani →