Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry
Edición de la obra Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry
| Autor | W. Murray Bullis |
|---|---|
| Editorial | U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology |
| Fecha de publicación | 1995 |
| Lugar | Gaithersburg, MD |