Surface and interface analysis of microelectronic materials processing and growth
12-13 October 1989, Santa Clara, California
Edición de la obra Surface and interface analysis of microelectronic materials processing and growth
| Autor | Fred H. Pollak |
|---|---|
| Editorial | SPIE--the International Society for Optical Engineering |
| Fecha de publicación | 1990 |
| Lugar | Bellingham, Wash., USA |
| Idioma | inglés |
| Páginas | 201 |
| ISBN-10 | 0819402222 |
| OCLC | 21282100 |
| LCCN | 89043522 |
| Serie | SPIE proceedings series -- vol. 1186 · Proceedings of SPIE--the International Society for Optical Engineering -- v. 1186. |