Spectroscopic charcterization techniques for semiconductor technology
November 9-10, 1983 Cambridge, Massachusetts
Edición de la obra Spectroscopic charcterization techniques for semiconductor technology
| Autor | Robert S. Bauer, Fred H. Pollak |
|---|---|
| Editorial | SPIE--The International Society for Optical Engineering |
| Fecha de publicación | 1983 |
| Lugar | Bellingham, Wash |
| Idioma | inglés |
| Páginas | 203 |
| ISBN-10 | 0892524871 |
| Serie | Proceedings of SPIE--the International Society for Optical Engineering -- v. 452 |
| Número de Cutter |