
Spectroscopic characterization techniques for semiconductor technology III
14-15 March 1988, Newport Beach, California
Edición de la obra Spectroscopic characterization techniques for semiconductor technology III
| Autor | Fred H. Pollak, Fernando Ponce, Orest J. Glembocki |
|---|---|
| Editorial | SPIE |
| Fecha de publicación | 1988 |
| Lugar |