Spectroscopic characterization techniques for semiconductor technology II
January 21-22, 1985, Los Angeles, California
Edición de la obra Spectroscopic characterization techniques for semiconductor technology II
| Autor | Fred H. Pollak |
|---|---|
| Editorial | SPIE--the International Society for Optical Engineering |
| Fecha de publicación | 1985 |
| Lugar | Bellingham, Wash., USA |
| Idioma | inglés |
| Páginas | 169 |
| ISBN-10 | 0892525592 |
| OCLC | 12307424 |
| LCCN | 85050424 |
| Serie | Proceedings of SPIE--the International Society for Optical Engineering -- v. 524 |