Spectroscopic characterization techniques for semiconductor technology
9-10 November 1983, Cambridge, Massachusetts
Edición de la obra Spectroscopic charcterization techniques for semiconductor technology
| Autor | Robert S. Bauer, Fred H. Pollak |
|---|---|
| Editorial | SPIE--the International Society for Optical Engineering |
| Fecha de publicación | 1984 |
| Lugar | Bellingham, Wash., USA |
| Idioma | inglés |
| Páginas | 203 |
| ISBN-10 | 0892524871 |
| LCCN | 83051560 |
| Serie | Proceedings of SPIE--the International Society for Optical Engineering -- v. 452 |