MEMS/MOEMS components and their applications IV
22-23 January 2007, San Jose, California, USA
Edición de la obra MEMS/MOEMS components and their applications IV
| Autor | Reza Ghodssi, Srinivas A. Tadigadapa |
|---|---|
| Editorial | SPIE |
| Fecha de publicación | 2007 |
| Lugar | Bellingham, Wash |
| Idioma | inglés |
| ISBN-13 | 9780819465771 |
| ISBN-10 | 0819465771 |
| OCLC | 85381162 |
| LCCN | 2007299154 |
| Serie | Proceedings of SPIE -- v. 6464 · Proceedings of SPIE--the International Society for Optical Engineering -- v. 6464. |