Characterization and metrology for ULSI technology, 2000
international conference, Gaithersburg, Maryland, 26-29 June 2000
Edición de la obra Characterization and metrology for ULSI technology, 2000
| Autor | David G. Seiler |
|---|---|
| Editorial | American Institute of Physics |
| Fecha de publicación | 2001 |
| Lugar | Melville, NY |
| Idioma | inglés |
| Páginas | 708 |
| ISBN-10 | 156396967X, 1563969793 |
| OCLC | 46652318 |
| LCCN | 00111547 |
| Serie | AIP conference proceedings -- 550 · AIP conference proceedings -- no. 550. |