Stephen M. Rossnagel · 7 obras en el catálogoObrasHandbook of ion beam processing technologyHandbook of plasma processing technologyHandbook of plasma processing technologyHandbook of ion beam processing technologyAuthor and subject cumulative index including tables of contents, Vols.1-24PPVD for MicroelectronicsPVD for MicroelectronicsNNon-Crystalline Films for Device StructuresNon-Crystalline Films for Device Structures