PPhoton, beam, and plasma enhanced processingPhoton, beam, and plasma enhanced processingde Van Tran NguyenMateriasThin film devicesCongressesSemiconductorsSemiconductor filmsSilicon-on-insulator technologyDesign and constructionMaterialsResearchMaterials scienceEdiciones (2)
EEnergy beam-solid interactions and transient thermal processEnergy beam-solid interactions and transient thermal processing