Materials issues in vacuum microelectronicsde Wei Zhu, Lawrence S. Pan, Christopher HollandMateriasVacuum microelectronicsCongressesThin filmsIon implantationField emission cathodesMaterialsField emissionVacuum technologyMicroelectronics
SShi you wu ran tu rang he you ni sheng wu chu li ji shuShi you wu ran tu rang he you ni sheng wu chu li ji shu