FFEM and Micromechatronics with ATILA SoftwareFEM and Micromechatronics with ATILA Softwarede Kenji UchinoMateriasMicroelectromechanical systemsMechatronicsMicroelectronicsElectromechanical devicesFinite element methodMicro-Electrical-Mechanical SystemsMécatroniqueMicrosystèmes électromécaniquesTECHNOLOGY & ENGINEERINGMechanical