BBio-MEMS and Medical MicrodevicesBio-MEMS and Medical Microdevicesde Angeliki Tserepi, Manuel Delgado-Restituto, Eleni Makarona, SPIEMateriasMicroelectromechanical systemsBiomedical engineeringBiosensorsBioMEMSMicro-Electrical-Mechanical SystemsCongressesBiomedical TechnologyBiosensing Techniques