AAdvanced Metallization Conference in 2001Advanced Metallization Conference in 2001de Takayuki OhbaMateriasIntegrated circuits, ultra large scale integrationThin filmsMetallic filmsEdiciones (1)Advanced Metallization Conference 2001 (Amc 2001) (2002)Materials Research Society · inglés · ISBN 9781558996700Más obras de Takayuki OhbaAdvanced Nanoscale ULSI Interconnects